Halogen lamp for RTP system

Thu, 18 Jun 2026 04:26:30 +0800

On the fab floor, a thermal excursion is not a footnote. A 5°C drift during photoresist soft bake or hard bake can kill linewidth control, and a non-uniform spike in RTP will trash your junction profiles. We built our halogen lamps for RTP to take that variability off the table. What actually matters These lamps use short-wave halogen emitters in a quartz envelope, so you get rapid, spectrally efficient heating with sub-second response. The spec you live by is thermal uniformity: ±0.1°C across the wafer, measured in situ—not inferred. Cleanroom compatibility is baked into the assembly: Class 1–100 compliant materials, sealed interfaces, and a path that keeps outgassing down. The payoff is zero particle generation, so your yield doesn’t get sacrificed to thermal cycling. Why this plays in lithography and photoresist Temperature is what sets critical dimensions. With ±0.1°C control, soft bake and hard bake profiles stick to the recipe, and repeatability holds across lots. In RTP, the fast ramp and tight uniformity cut thermal budget, which protects shallow junctions and thin films. You end up with tighter distributions, fewer reworks, and cycle times that stay stable. Efficiency helps too—radiant transfer and precise duty cycles keep energy use down. What you need to get right on install Pay attention to coolant flow, polarity, and mounting torque. That’s what keeps the seal intact and the optical alignment where it needs to be. The lamp works with standard RTP chambers, but the reflector geometry has to match the target hot-zone. Plan for a calibration offset after 2,000 hours. The output drift is small, but it’s real. We call it out, and we schedule it.

System on Factory Direct Infrared Heating

Halogen lamp for RTP system