Ultra pure water heating lamp

Wed, 03 Jun 2026 12:27:48 +0800

On the fab floor, photoresist bake isn’t about peak temperature alone. It’s about thermal uniformity across the wafer. A 0.5°C drift can move CD bias and knock yield off spec. We built our ultra pure water heating lamp to keep the thermal profile stable where it matters—on the resist, across the whole surface, cycle after cycle. What matters, technically, is control. We use a short-wave halogen emitter in a quartz envelope, paired with a low-thermal-mass geometry. That gives you rapid, directional heating with sub-second response. The payoff is wafer-level uniformity within ±0.1°C and run-to-run repeatability within 0.05°C. The lamp head is cleanroom-rated for Class 1–100. The fluid path is sealed, and it runs without shedding particles, even continuously. Output is closed-loop and calibrated, compensating for line voltage swings and water inlet temperature. That preserves the thermal budget for both soft bake and hard bake. In lithography, consistent bake is the gatekeeper for linewidth and sidewall profile. This lamp locks down the bake curve, so CD scatter drops and you see less footing and scum after development. Process windows open up, rework falls, and you stop chasing the recipe every shift. Energy use drops, too. Fast thermal response cuts out overshoot and idle soak, so you save standby power without hurting throughput. With MTBF over 5,000 hours and output drift under 5% across the service interval, unplanned downtime shrinks and schedules stay predictable. The lamp drops into standard bake tracks, but the water block and quartz envelope carry thermal mass, so watch your mounting tolerances. Micro-vibration can couple into alignment if you don’t set it up right. Water quality is non-negotiable. Keep ultra pure water resistivity above 18 MΩ·cm and particulates below 0.1 μm. If you don’t, you’ll see filming and hot spots. After install, give the system a short thermal soak to settle in, then re-validate the uniformity map before you bring it back to production.

Pure on Factory Direct Infrared Heating

Ultra pure water heating lamp