Quartz glass shield for fab lamp

Mon, 01 Jun 2026 20:26:30 +0800

On the fab floor, photoresist bake repeatability is just the price of admission. A 2°C drift during soft bake or hard bake eats into your critical dimension budget fast—and you know what that means: yield slipping away. The quartz glass shield on the fab lamps is there to keep the thermal field honest right where the wafer meets the photoresist. What matters under the hood We run high-purity quartz because it transmits short-wave and medium-wave energy with minimal absorption, so lamp output and spectral stability stay where they need to be. Thermal uniformity across the wafer holds at ±0.1°C, which is the baseline for consistent photoresist flow and clean solvent removal. The material plays nice in cleanroom Class 1–100, and the design keeps particle generation at zero during operation—so the photolithography stack stays clean. You get 24/7 reliability with no unplanned downtime, plus a long service life and stable output over thousands of hours. Why it fits the way we run lithography You’re operating on tight thermal budgets. This shield keeps lamp energy focused, cuts out hot spots, and keeps both soft bake and hard bake profiles repeatable. The payoff shows up as tighter overlay, fewer rework lots, and less scrap. You’ll also see energy use drop because the lamp runs efficiently, and the shield’s durability means fewer spares and less maintenance downtime. What you need to keep straight on install and upkeep Installation comes down to precise alignment to the lamp axis and a clean interface to the fixture. Handle it with cleanroom-compliant procedure; a micro-scratch will scatter light and come back to haunt you. Match the shield to the lamp type and voltage—mismatch will shift spectral output and hurt uniformity. Set up scheduled inspections to confirm transmission and integrity, especially when you’re running high-power cycles.

Glass on Factory Direct Infrared Heating

Quartz glass shield for fab lamp