Compact infrared dryer for IC

Sat, 27 Jun 2026 05:01:35 +0800

On the fab floor, a soft bake that drifts by 2°C will shift a photoresist profile. A hard bake that runs hot at the edge can leave scum. A compact infrared dryer for IC isn’t a nice-to-have—it’s a process anchor. We built this unit to hold thermal repeatability in lithography and packaging lines, because in this business, every wafer counts. What matters under the hood We run near-infrared (NIR) emitters tuned for fast, volumetric heating with low thermal inertia. Temperature uniformity across the wafer stays within ±0.1°C, and setpoint repeatability holds at ±0.5°C, so your photoresist bake profiles lock in from lot to lot. The dryer fits Class 1–100 cleanrooms, with a particle-controlled air path and zero-particle emission materials. It’s meant for 24/7 operation, with MTBF exceeding 20,000 hours and zero unplanned downtime in pilot deployments. Footprint is tight: 300 mm × 200 mm × 150 mm, with 24 VDC or 48 VDC and standard connectors to drop into existing tracks. Here’s why it works on the line. You need heat that responds quickly without overshoot. NIR gives you a fast ramp with tight closed-loop control, so bake time drops and throughput climbs. Energy use falls because the emitter hits the wafer and substrate directly, not the chamber walls. In photoresist processing, that translates to tighter critical dimension control and fewer reworks. In packaging, it dries underfill and clears moisture without warping. Cleanroom compatibility keeps particle counts down—exactly what advanced nodes demand. A few practical notes. The dryer needs a stable, filtered power supply and a clean, dry feed air path to keep the optical window clear. Warm-up is short, but bakes should only start after the 10-minute stabilization window. It’s compact, but you still need clearance around the emitter zone for safety interlocks and exhaust. Match the emitter spectrum to your photoresist and substrate stack; our application team can map a process recipe to your line.

Compact on Factory Direct Infrared Heating

Compact infrared dryer for IC